Effect of argon flow on promoting boron doping for in-situ grown silicon nitride thin films containing silicon quantum dots-陕西省能源新材料与器件重点实验室

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Effect of argon flow on promoting boron doping for in-situ grown silicon nitride thin films containing silicon quantum dots

2017年06月29日

J. Liu; B. Liu; X. Zhang; X. Guo; S. F. Liu, Effect of argon flow on promoting boron doping for in-situ grown silicon nitride thin films containing silicon quantum dots. Nanotechnology 2017, 28 (28), 285202.

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